标准编号:BS EN ISO 14644-2-20
标准名称:洁净室和相关控制环境.证明继续与ISO 14644-1相符的检测和监控规范
英文名称:Cleanrooms and associated controlled environments - Specifications for testing and monitoring to prove continued compliance with ISO 14644-1
发布部门:
发布日期:2000-12-15
实施日期:2000-12-15
标准状态:现行
文件格式:PDF